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论文库 |
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| 论文编号: |
2013-2066 |
| 作者: |
Wei, Jiang(1); Nan, Wang(1); Wei, Yan(2); Song, Hu(1); Xiao-Qiong, Pu(1) |
| 刊物名称: |
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings |
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| 论文题目英文: |
The next generation microelectronics craft technique: Nanoimprint lithography |
| 年: |
2013 |
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| 页: |
337-342 |
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